# 台灣半導體製造公司執行長表示，台積電在次世代晶片製造上並未落後。

*semiconductor · news · 2026-06-04 · MarketScreener*

## Key points

- 台積電已購買ASML先進的High-NA EUV機台，但尚未開始量產。
- 台積電優先考量成本效益，才會將High-NA EUV機台投入日常製造。
- 執行長魏哲家拒絕透露台積電購買High-NA EUV機台的數量。
- 台積電認為部分目標仍可用標準EUV工具達成，暫時避免立即採用High-NA。

By Yang Jie Taiwan Semiconductor Manufacturing isn't falling behind in next-generation chipmaking, its CEO said, dismissing concerns that it's at a disadvantage to rivals already adopting ultra-expensive equipment to make cutting-edge chips. Speaking at an annual shareholders' meeting, TSMC Chief Executive C.C. Wei clarified the chip giant's position on the machines made exclusively by Dutch company ASML, and seen as critical for pushing the limits of microchip manufacturing. "The fact is, we have already purchased that equipment, and our team is actively conducting related research and development. It is simply not yet being deployed for volume mass production," Wei said Thursday. When pressed by a shareholder to say how many units the Taiwanese company has bought from ASML, Wei declined to give a specific figure. ASML's lithography machines, which use light to etch features onto silicon wafers, have become a prized asset for makers of powerful AI chips. The most advanced version of the technology, known as High-NA EUV, can print even smaller, denser transistor configurations. That's a major step up technologically, but it comes at a price. While High-NA EUV offers unparalleled resolution, it introduces a massive commercial hurdle because each machine would cost way more than then current-generation systems. TSMC competitors like Intel are early adopters of the technology, which can cost up to $400 million. For Wei, the price tag is a massive hurdle. He told shareholders that right now, TSMC is focused on figuring out how to make the machines run more efficiently to lower manufacturing costs. The company will only use the equipment for everyday factory production once the numbers make sense and it is financially profitable to do so, he added. The remarks build on statements from TSMC executive Kevin Zhang in April that sparked a selloff in ASML shares. Speaking at the company's technology forum, Zhang said that some of TSMC's current goals remain achievable using standard EUV tools, adding that the new equipment is simply "very expensive". Write to Yang Jie at jie.yang@wsj.com (END) Dow Jones Newswires 06-04-26 0007ET

**Companies:** Taiwan Semiconductor Manufacturing, ASML, Intel
**Countries:** Taiwan, Netherlands

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